[1]李慧,吴爱民,张文兰,等.线形同轴耦合微波等离子体诊断及硅薄膜制备[J].哈尔滨工程大学学报,2015,(03):423-426.[doi:10.3969/j.issn.1006-7043.201311019]
 LI Hui,WU Aimin,ZHANG Wenlan,et al.Diagnosis of linearly coaxially coupled microwave plasma and preparation of silicon thin films[J].hebgcdxxb,2015,(03):423-426.[doi:10.3969/j.issn.1006-7043.201311019]
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线形同轴耦合微波等离子体诊断及硅薄膜制备
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《哈尔滨工程大学学报》[ISSN:1006-6977/CN:61-1281/TN]

卷:
期数:
2015年03期
页码:
423-426
栏目:
出版日期:
2015-03-25

文章信息/Info

Title:
Diagnosis of linearly coaxially coupled microwave plasma and preparation of silicon thin films
作者:
李慧1 吴爱民123 张文兰4 陆文琪24 秦福文24 董闯12
1. 大连理工大学 材料科学与工程学院, 辽宁 大连 116024;
2. 大连理工大学 三束材料改性教育部重点实验室, 辽宁 大连 116024;
3. 大连理工大学 常州研究院, 江苏 常州 213164;
4. 大连理工大学 物理与光电工程学院, 辽宁 大连 116024
Author(s):
LI Hui1 WU Aimin123 ZHANG Wenlan4 LU Wenq24 QIN Fuwen24 DONG Chuang12
1. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;
2. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Ministry of Education), Dalian University of Technology, Dalian 116024, China;
3. Changzhou Institute, Dalian University of Technology, Changzhou 213164, China;
4. School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian 116024, China
关键词:
线形同轴耦合微波等离子体等离子体诊断电子密度多晶硅薄膜拉曼XRD
分类号:
TN304.055
DOI:
10.3969/j.issn.1006-7043.201311019
文献标志码:
A
摘要:
开发了一种新型线形同轴耦合大面积微波等离子体源,针对该新型等离子体源放电空间等离子密度及分布的不明确性,利用朗缪尔单探针法研究了不同放电参数下该等离子体源等离子体密度及空间分布情况.以微波功率,氢氩总流量(氢氩流量比为3:1)和距石英管的距离Z为3个因素设计正交实验探究了宏观放电参量对等离子体参数的影响.测试结果表明该型等离子体源的电子密度均在1010cm-3以上.其次,诊断了在距石英管Z为14 cm处,等离子体参数沿空间水平的分布情况,探究薄膜的最佳沉积区域.最后,根据等离子诊断情况进行硅薄膜的沉积,由XRD结果表明薄膜为多晶结构,拉曼光谱显示沉积硅薄膜晶化率均在92%以上,沉积速率在8 nm/min.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期:2013-11-8;改回日期:。
基金项目:江苏省自然科学基金资助项目(BK2011252);常州市工业支撑计划资助项目(CE20110012);中央高校基本科研业务费专项资金资助项目(DUT13JN08,DUT12JN02).
作者简介:李慧(1988-),女,硕士研究生;吴爱民(1973-),男,副教授,博士生导师.
通讯作者:吴爱民,E-mail:aimin@dlut.edu.cn.
更新日期/Last Update: 2015-06-16